Reticle Cabinet
Reticle Cabinet functions as photomask pod storage equipment with an purging function. It is designed to store photomask pods for IC production in batches and ensures the quality of photomasks by filling them with pure gas.
For the first time in China, MeetFuture's Reticle Cabinet has achieved the ability to reduce the humidity of the photomask pod to below RH10% in a very short time, even with a very small flow rate.
For the first time in China, MeetFuture's Reticle Cabinet has achieved the ability to reduce the humidity of the photomask pod to below RH10% in a very short time, even with a very small flow rate.
Feature Highlights:
User-friendly man-machine interface
Stable system integration
Drawer design for mass storage
High-speed continuous purge
Compatibility with multiple EAP communications
Software Description
Reticle Cabinet Storage Cabinet Software System
Reticle Cabinet Software
The software provides real-time feedback on materials information, purge time, and purging stage for the current materials . It also monitors the flow and generates alarms accordingly.
Feature Highlights:
? Supports touchscreen control
? Allows dynamic configuration of customer parameters
? Supports docking with EAP and MF FabScope systems
Feature Highlights:
? Supports touchscreen control
? Allows dynamic configuration of customer parameters
? Supports docking with EAP and MF FabScope systems
Important Parameters
| Technical Indicators | Parameters |
Dimensions (L*W*H) | 2217mm*1058mm*1913mm |
| Weight (full/empty) | 630kg&460kg |
Self (Number of positions) | 84 |
Storing POD Types | SMIF POD RSP3 RSP1 |
RFID read rate | ≥99.999% |
power supply | 220V,50Hz,2A |
Related Product Recommendations