Wafer Cassette Load Port Station(LPS)
The Load Port Station collaborates with OHT to load and unload FOUP via E84 communication, enabling seamless communication with the upper-level MCS/EAP system.
Optional configuration: Single port and double ports; Clamp
Optional configuration: Single port and double ports; Clamp
Feature Highlights:
User-friendly man-machine interface
Stable system integration
Load/Unload autonomous switching
SEMI S2 certified
Compatibility with multiple EAP communications
Available Clamp option
Software Description
LPS Software
LPS Software
The LPS Software provides a real-time display of the operational status of each platform (Port), encompassing operation mode, service status, sensor status, external IO output status, and Foup-related information.
Feature Highlights:
? Single client architecture, minimizing hardware requirements, easy to deploy and maintain, supporting a variety of databases.
? Accurate identification of product information, collaborating with the AMHS system to expedite product delivery and achieve optimal on-site product process operations.
? Reducing the risk of human transportation, cutting operating costs, and ensuring the best product quality.
Feature Highlights:
? Single client architecture, minimizing hardware requirements, easy to deploy and maintain, supporting a variety of databases.
? Accurate identification of product information, collaborating with the AMHS system to expedite product delivery and achieve optimal on-site product process operations.
? Reducing the risk of human transportation, cutting operating costs, and ensuring the best product quality.
Important Parameters
| Technical Indicators | Parameters |
| Dimensions (L*W*H) | 272(mm)*523(mm)*1720(mm) |
Weight | 150kg |
Load (number of positions) | 30kg |
Vibration | <0.5G |
Noise | ≤70Db |
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