This system provides intelligent management for STK, adhering to the SEMI E88 protocol. It receives command assignments from upper-level systems like MCS to handle the warehousing and delivery of wafer cassettes. With a 3D camera, the AutoTeach function can be quickly implemented, simplifying factory installation and implementation. It also supports the reading of RFID, Smart Tag, and other tags. Equipped with self-developed RFID, SmartTag, and E84 modules, the reading success rate of this equipment reaches the industry's leading standard.

Application Scenario: Storage Equipment Control and Inventory Query

Feature Highlights:
? The MeetFuture intelligent storage control system utilizes an advanced intelligent algorithm to optimize instruction execution and materials management logic in the storage library. This results in shorter access and handling times for wafer cassettes, thereby increasing the frequency and utilization efficiency of the storage library.
? Supports docking with a variety of mainstream MCS for efficient system implementation.
? Enables real-time monitoring of multi-channel gas flow, pressure, and humidity.